Photolithography

THIS PAGE IS UNDER CONSTRUCTION

• How to Make a Mask
• Resists at QNF
• Developers at QNF -- Under Construction
• Ancillary Process Chemicals at QNF -- Under Construction
• KemLab Resist Presentation

External Resources

• Photolithography - Chris A. Mack (Lithoguru)
• EPFL
  • Introduction to Photolithography
• MicroChemicals
  • Softbake
  • Rehydration
  • Development
• IMM Technical Resources
  • Lithography Process Overview
  • Effect of Ambient Humidity on Photoresists