Anatech SCE-106 Barrel Asher
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| Tool Name | Anatech SCE-106 Barrel Asher |
|---|---|
| Instrument Type | Soft Lithography |
| Staff Manager | Sam Azadi |
| Lab Location | Bay 2 |
| Tool Manufacturer | Anatech |
| Tool Model | SCE-106 |
| NEMO Designation | DE-07 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
Anatech USA’s SCE-100 Series Inductively Coupled (ICP) Plasma systems are extremely effective for a Plasma Ashing process to remove organics prior to thin film deposition and/or chemical analysis of remaining inorganics.
Process gases are CF4, O2, Ar and N2. Sample sizes are pieces to 150 mm round wafers.
Applications
- Removal of photoresist
- Removal of organic materials