CEE Apogee Spinner
| Tool Name | CEE Apogee Spinner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bays 4, 5 & 6 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-01, -03, -06, -08, -09 |
| Lab Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoaters are located in Bays 4, 5 and 6. Control of ramp rate and speed. Includes wafer centering step. *HMDS spin-on is not allowed outside of SPN-04*
Select SPN-01 when submitting training request on NEMO. Share specific process information in the description.
Allowed Materials
SPN-01: Acetone compatible/soluble resists only – S18xx, SPR 220-x, AZ series, KL series, K-Pro. No LOR, PMGI or Polyimide!
SPN-03: LOR, PMGI, Polyimide
SPN-06: E-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No LOR, PMGI or Polyimide!
SPN-08: Negative epoxy resists only - SU8, HARE SQ
SPN-09: PDMS
Resources
SOPs
- SOP: SOP
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly
Troubleshooting
Vacuum Issues
Have you:
- Confirmed your chuck size is correct for your substrate?
- Checked the chuck base is properly screwed on, if the base is needed?
- Checked that all o-rings are installed, if needed?
- Checked the chuck for residue?
- Checked that the chuck was installed on the spindle correctly?
Vacuum is met when the correct chuck size is chosen and chuck/base seal correctly. See above resources for more info. For piece parts, carefully screw on the base, don't cross the threads! Also make sure to screw as tightly as the chuck allows, but not further. These parts are plastic and can easily deteriorate if abused.