Difference between revisions of "Photolithography"
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=====External Resources===== | =====External Resources===== | ||
*'''[https://www.lithoguru.com/scientist/lithobasics.html Chris A. Mack (Lithoguru) - Photolithography]''' | *'''[https://www.lithoguru.com/scientist/lithobasics.html Chris A. Mack (Lithoguru) - Photolithography]''' | ||
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*'''[https://www.epfl.ch/research/facilities/cmi/process/photolithography/ EPFL]''' | *'''[https://www.epfl.ch/research/facilities/cmi/process/photolithography/ EPFL]''' | ||
**[https://www.epfl.ch/research/facilities/cmi/process/photolithography/introductiontophotolithography/ Introduction to Photolithography] | **[https://www.epfl.ch/research/facilities/cmi/process/photolithography/introductiontophotolithography/ Introduction to Photolithography] | ||
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*'''[https://www.microchemicals.com/DOWNLOADS/Application-Notes/ MicroChemicals]''' | *'''[https://www.microchemicals.com/DOWNLOADS/Application-Notes/ MicroChemicals]''' | ||
** [https://www.microchemicals.com/dokumente/application_notes/softbake_photoresist.pdf Softbake] | ** [https://www.microchemicals.com/dokumente/application_notes/softbake_photoresist.pdf Softbake] | ||
** [https://www.microchemicals.com/dokumente/application_notes/photoresist_rehydration.pdf Rehydration] | ** [https://www.microchemicals.com/dokumente/application_notes/photoresist_rehydration.pdf Rehydration] | ||
**[https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Development] | **[https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Development] | ||
| + | **[https://www.microchemicals.com/dokumente/application_notes/lithography_trouble_shooting.pdf Troubleshooting] | ||
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* '''[https://www.imicromaterials.com/technical IMM Technical Resources]''' | * '''[https://www.imicromaterials.com/technical IMM Technical Resources]''' | ||
**[https://www.imicromaterials.com/index.php/technical/lithography-process-overview Lithography Process Overview] | **[https://www.imicromaterials.com/index.php/technical/lithography-process-overview Lithography Process Overview] | ||
**[https://www.imicromaterials.com/index.php/products/ig-line-photoresists/humidity-control Effect of Ambient Humidity on Photoresists] | **[https://www.imicromaterials.com/index.php/products/ig-line-photoresists/humidity-control Effect of Ambient Humidity on Photoresists] | ||
Revision as of 16:17, 25 July 2025
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