Difference between revisions of "Photolithography"

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** [https://www.microchemicals.com/dokumente/application_notes/softbake_photoresist.pdf Softbake]
 
** [https://www.microchemicals.com/dokumente/application_notes/softbake_photoresist.pdf Softbake]
 
** [https://www.microchemicals.com/dokumente/application_notes/photoresist_rehydration.pdf Rehydration]
 
** [https://www.microchemicals.com/dokumente/application_notes/photoresist_rehydration.pdf Rehydration]
 +
**[https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Development]
 
* '''[https://www.imicromaterials.com/technical IMM Technical Resources]'''
 
* '''[https://www.imicromaterials.com/technical IMM Technical Resources]'''
 
**[https://www.imicromaterials.com/index.php/technical/lithography-process-overview Lithography Process Overview]
 
**[https://www.imicromaterials.com/index.php/technical/lithography-process-overview Lithography Process Overview]
 
**[https://www.imicromaterials.com/index.php/products/ig-line-photoresists/humidity-control Effect of Ambient Humidity on Photoresists]
 
**[https://www.imicromaterials.com/index.php/products/ig-line-photoresists/humidity-control Effect of Ambient Humidity on Photoresists]

Revision as of 16:16, 25 July 2025