Difference between revisions of "Photolithography"

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* [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation]
 
* [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation]
  
=====Resources=====
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=====External Resources=====
*[https://www.epfl.ch/research/facilities/cmi/process/photolithography/introductiontophotolithography/ Introduction to Photolithography - EPFL]
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*'''[https://www.lithoguru.com/scientist/lithobasics.html Photolithography - Chris A. Mack (Lithoguru)]'''
*[https://www.lithoguru.com/scientist/lithobasics.html Photolithography - Chris A. Mack (Lithoguru)]
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*'''[https://www.epfl.ch/research/facilities/cmi/process/photolithography/ EPFL]'''
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**[https://www.epfl.ch/research/facilities/cmi/process/photolithography/introductiontophotolithography/ Introduction to Photolithography]
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*'''[https://www.microchemicals.com/DOWNLOADS/Application-Notes/ MicroChemicals]'''
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** [https://www.microchemicals.com/dokumente/application_notes/softbake_photoresist.pdf Softbake]
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** [https://www.microchemicals.com/dokumente/application_notes/photoresist_rehydration.pdf Rehydration]
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* '''[https://www.imicromaterials.com/technical IMM Technical Resources]'''
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**[https://www.imicromaterials.com/index.php/technical/lithography-process-overview Lithography Process Overview]
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**[https://www.imicromaterials.com/index.php/products/ig-line-photoresists/humidity-control Effect of Ambient Humidity on Photoresists]

Revision as of 16:15, 25 July 2025