Difference between revisions of "Photolithography"
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* [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | * [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | ||
| − | =====Resources===== | + | =====External Resources===== |
| − | *[https://www.epfl.ch/research/facilities/cmi/process/photolithography/introductiontophotolithography/ Introduction to Photolithography - | + | *'''[https://www.lithoguru.com/scientist/lithobasics.html Photolithography - Chris A. Mack (Lithoguru)]''' |
| − | *[https://www. | + | *'''[https://www.epfl.ch/research/facilities/cmi/process/photolithography/ EPFL]''' |
| + | **[https://www.epfl.ch/research/facilities/cmi/process/photolithography/introductiontophotolithography/ Introduction to Photolithography] | ||
| + | *'''[https://www.microchemicals.com/DOWNLOADS/Application-Notes/ MicroChemicals]''' | ||
| + | ** [https://www.microchemicals.com/dokumente/application_notes/softbake_photoresist.pdf Softbake] | ||
| + | ** [https://www.microchemicals.com/dokumente/application_notes/photoresist_rehydration.pdf Rehydration] | ||
| + | * '''[https://www.imicromaterials.com/technical IMM Technical Resources]''' | ||
| + | **[https://www.imicromaterials.com/index.php/technical/lithography-process-overview Lithography Process Overview] | ||
| + | **[https://www.imicromaterials.com/index.php/products/ig-line-photoresists/humidity-control Effect of Ambient Humidity on Photoresists] | ||
Revision as of 16:15, 25 July 2025
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- How to Make a Mask
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