Difference between revisions of "Tousimis Critical Point Dryer"
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| − | [[Category: | + | [[Category:Wet Processing]] |
{{EquipmentInfo | {{EquipmentInfo | ||
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| image = [[Image:CPD-01.jpeg|300px]] | | image = [[Image:CPD-01.jpeg|300px]] | ||
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| − | | Instrument_Type = | + | | Instrument_Type = Wet Processing |
| − | | Staff_Manager = [[ | + | | Staff_Manager = [[Travis Venables | Travis Venables]] |
| Lab_Location = Bay 3 | | Lab_Location = Bay 3 | ||
| Tool_Manufacturer = Tousimis | | Tool_Manufacturer = Tousimis | ||
Revision as of 09:59, 25 July 2025
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| Tool Name | Tousimis Critical Point Dryer |
|---|---|
| Instrument Type | Wet Processing |
| Staff Manager | Travis Venables |
| Lab Location | Bay 3 |
| Tool Manufacturer | Tousimis |
| Tool Model | 931-C |
| NEMO Designation | CPD-01 |
| Nearest Phone | XXXXX |
| SOP Link | SOP |
Description
The system enables drying of delicate samples through the use of liquid carbon dioxide as a transitional fluid which has zero surface tension at the critical point (1072 psi at 31 C). The tool can process pieces up to several 100 mm substrates.
Applications
- Carbon dioxide (CO2) drying after release of bulk or surface micromachined devices