Difference between revisions of "CEE Apogee Spinner"

**CEE Apogee Spinner**
Tool Name	CEE Apogee Spinner
Instrument Type	Lithography
Staff Manager	Ana Cohen
Lab Location	Bays 4, 5 & 6
Tool Manufacturer	CEE
Tool Model	Apogee
NEMO Designation	SPN-01, -03, -06, -08, -09
Lab Phone
SOP Link	SOP

Revision as of 13:23, 28 June 2024

Description

CEE Apogee spincoaters are located in Bays 4, 5 and 6. Control of ramp rate and speed. Includes wafer centering step. *HMDS spin-on is not allowed outside of SPN-04*

Select SPN-01 when submitting training request on NEMO. Share specific process information in the description.

Allowed Materials

SPN-01: Acetone compatible/soluble resists only – S18xx, SPR 220-x, AZ series, KL series, K-Pro. No LOR, PMGI or Polyimide!
SPN-03: LOR, PMGI, Polyimide
SPN-06: E-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No LOR, PMGI or Polyimide!
SPN-08: Negative epoxy resists only - SU8, HARE SQ
SPN-09: PDMS

Resources

SOPs

SOP: SOP
Video - Manual Dispense
Video - Centering Device
Video - Chuck Installation
Video - Chuck Assembly

Troubleshooting

Vacuum Issues

Check your chuck! Vacuum is met when the correct chuck size is chosen and chuck/base seal correctly. See resources above for more info. For piece parts, carefully screw on the base, don't cross the threads! Also make sure to screw as tightly as the chuck allows, but not further. These parts are plastic and can easily deteriorate if abused.

Revision as of 11:26, 24 June 2024 (view source) Coana (talk \| contribs) ← Older edit		Revision as of 13:23, 28 June 2024 (view source) Coana (talk \| contribs) (→‎Vacuum Issues) Newer edit →
Line 40:		Line 40:

	======Vacuum Issues ======		======Vacuum Issues ======
−	Check your chuck! Vacuum is met when the correct chuck size is chosen and chuck/base seal correctly. See resources ~~below~~ for more info. For piece parts, carefully screw on the base, don't cross the threads! Also make sure to screw as tightly as the chuck allows, but not further. These parts are plastic and can easily deteriorate if abused.	+	Check your chuck! Vacuum is met when the correct chuck size is chosen and chuck/base seal correctly. See resources above for more info. For piece parts, carefully screw on the base, don't cross the threads! Also make sure to screw as tightly as the chuck allows, but not further. These parts are plastic and can easily deteriorate if abused.