Difference between revisions of "Tousimis Critical Point Dryer"
Jump to navigation
Jump to search
m (Changed protection level for "Tousimis Critical Point Dryer" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite))) |
(update tool owner, update to NEMO) |
||
| Line 7: | Line 7: | ||
| imagecaption = | | imagecaption = | ||
| Instrument_Type = Back End | | Instrument_Type = Back End | ||
| − | | Staff_Manager = | + | | Staff_Manager = [[Kyle Keenan | Kyle Keenan]] |
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| Tool_Manufacturer = Tousimis | | Tool_Manufacturer = Tousimis | ||
| Tool_Model = 931-C | | Tool_Model = 931-C | ||
| − | | | + | | NEMO_Designation = CPD-01 |
| Lab_Phone = XXXXX | | Lab_Phone = XXXXX | ||
| SOP Link = [https://www.seas.upenn.edu/~nanosop/CriticalPointDryer.htm SOP] | | SOP Link = [https://www.seas.upenn.edu/~nanosop/CriticalPointDryer.htm SOP] | ||
Revision as of 13:25, 3 January 2024
 |
|
| Tool Name | Tousimis Critical Point Dryer |
|---|---|
| Instrument Type | Back End |
| Staff Manager | Kyle Keenan |
| Lab Location | Bay 2 |
| Tool Manufacturer | Tousimis |
| Tool Model | 931-C |
| NEMO Designation | CPD-01 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The system enables drying of delicate samples through the use of liquid carbon dioxide as a transitional fluid which has zero surface tension at the critical point (1072 psi at 31 C). The tool can process pieces up to several 100 mm substrates.
Applications
- Carbon dioxide (CO2) drying after release of bulk or surface micromachined devices