Difference between revisions of "Ag master recipe"
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> [[Denton_Explorer14_Magnetron_Sputterer#Process_data_&_master_recipes | Click here to return to PVD-05]] < | > [[Denton_Explorer14_Magnetron_Sputterer#Process_data_&_master_recipes | Click here to return to PVD-05]] < | ||
| − | Note the extra long cool-down time. Reducing this time | + | Step T006 is the deposition step. Note the extra long cool-down time in step T012. Reducing the cool-down time will result in significant surface oxidation. Please do not alter this time. |
{| class="wikitable" | {| class="wikitable" | ||
| − | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006 | + | ! Step Number || T000 || T001 || T002 || T003 || T004 || T005 || T006 || T007 || T008 || T009 || T010 || T011 || T012 || T013 |
|- | |- | ||
|- | |- | ||
| − | | Step Time (sec) || | + | | Step Time (sec) || 5 || 30 || 30 || 30 || 30 || 30 || [dep] || 30 || 30 || 30 || 30 || 30 || 900 || 5 |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| − | | Min Vacuum Setpoint (Torr) || | + | | Min Vacuum Setpoint (Torr) || || || || || || || || || || || || || || |
|- | |- | ||
| − | | || || | + | | || || || || || || || || || || || || || || |
|-style="background-color:#DBFEFF" | |-style="background-color:#DBFEFF" | ||
| − | | Gas - (PID or Fixed) || | + | | Gas - (PID or Fixed) || || PID || PID || PID || PID || PID || PID || PID || PID || PID || PID || PID || || |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| − | | Gas - PID Master Gas Select || | + | | Gas - PID Master Gas Select || || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || || |
|- | |- | ||
| − | | Gas1 - Setpoint (sccm) || | + | | Gas1 - Setpoint (sccm) || || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 || 10 || || |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| − | | Gas2 - Setpoint (sccm) || | + | | Gas2 - Setpoint (sccm) || || || || || || || || || || || || || || |
|- | |- | ||
| − | | || || | + | | || || || || || || || || || || || || || || |
|-style="background-color:#DEB4DC" | |-style="background-color:#DEB4DC" | ||
| − | |Gas PID Pressure (mTorr) || | + | |Gas PID Pressure (mTorr) || || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 || 3 || || |
|-style="background-color:#DCF5E9" | |-style="background-color:#DCF5E9" | ||
| − | | RF Source - Sputter (Watts) || | + | | RF Source - Sputter (Watts) || || || || || || || || || || || || || || |
|-style="background-color:#DCF5E9" | |-style="background-color:#DCF5E9" | ||
| − | | RF Source - Cathode Select || | + | | RF Source - Cathode Select || || || || || || || || || || || || || || |
|-style="background-color:#DCF5E9" | |-style="background-color:#DCF5E9" | ||
| − | | RF Source - Shutter || | + | | RF Source - Shutter || || || || || || || || || || || || || || |
|-style="background-color:#ECFA6F" | |-style="background-color:#ECFA6F" | ||
| − | | DC 1 Source - Sputter (Watts) || | + | | DC 1 Source - Sputter (Watts) || || 25 || 50 || 75 || 100 || 125 || 140 || 120 || 100 || 80 || 60 || 25 || || |
|-style="background-color:#ECFA6F" | |-style="background-color:#ECFA6F" | ||
| − | | DC 1 Source - Cathode Select || | + | | DC 1 Source - Cathode Select || || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || || |
|-style="background-color:#ECFA6F" | |-style="background-color:#ECFA6F" | ||
| − | | DC 1 Source - Shutter || | + | | DC 1 Source - Shutter || || || || || || || Open || || || || || || || |
|-style="background-color:#FAD86F" | |-style="background-color:#FAD86F" | ||
| − | | DC 2 Source - Sputter (Watts) || | + | | DC 2 Source - Sputter (Watts) || || || || || || || || || || || || || || |
|-style="background-color:#FAD86F" | |-style="background-color:#FAD86F" | ||
| − | | || || || || || || || | + | | || || || || || || || || || || || || || || |
|-style="background-color:#FAD86F" | |-style="background-color:#FAD86F" | ||
| − | | DC 2 Source - Shutter || | + | | DC 2 Source - Shutter || || || || || || || || || || || || || || |
|-style="background-color:#6FD2FA" | |-style="background-color:#6FD2FA" | ||
| − | | Pressure Control (Throttle) || | + | | Pressure Control (Throttle) || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || || |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| − | | Ignition Pressure (mTorr) || | + | | Ignition Pressure (mTorr) || || || || || || || || || || || || || || |
|- | |- | ||
| − | | || || | + | | || || || || || || || || || || || || || || |
|-style="background-color:#E8F213" | |-style="background-color:#E8F213" | ||
| − | | Rotation Speed (0-100%) || | + | | Rotation Speed (0-100%) || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || |
|- | |- | ||
| − | | End Process (Yes) || | + | | End Process (Yes) || || || || || || || || || || || || || || Yes |
|} | |} | ||
Latest revision as of 11:27, 31 January 2023
> Click here to return to PVD-05 <
Step T006 is the deposition step. Note the extra long cool-down time in step T012. Reducing the cool-down time will result in significant surface oxidation. Please do not alter this time.
| Step Number | T000 | T001 | T002 | T003 | T004 | T005 | T006 | T007 | T008 | T009 | T010 | T011 | T012 | T013 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Step Time (sec) | 5 | 30 | 30 | 30 | 30 | 30 | [dep] | 30 | 30 | 30 | 30 | 30 | 900 | 5 |
| Min Vacuum Setpoint (Torr) | ||||||||||||||
| Gas - (PID or Fixed) | PID | PID | PID | PID | PID | PID | PID | PID | PID | PID | PID | |||
| Gas - PID Master Gas Select | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | |||
| Gas1 - Setpoint (sccm) | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | |||
| Gas2 - Setpoint (sccm) | ||||||||||||||
| Gas PID Pressure (mTorr) | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | |||
| RF Source - Sputter (Watts) | ||||||||||||||
| RF Source - Cathode Select | ||||||||||||||
| RF Source - Shutter | ||||||||||||||
| DC 1 Source - Sputter (Watts) | 25 | 50 | 75 | 100 | 125 | 140 | 120 | 100 | 80 | 60 | 25 | |||
| DC 1 Source - Cathode Select | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | |||
| DC 1 Source - Shutter | Open | |||||||||||||
| DC 2 Source - Sputter (Watts) | ||||||||||||||
| DC 2 Source - Shutter | ||||||||||||||
| Pressure Control (Throttle) | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | ||
| Ignition Pressure (mTorr) | ||||||||||||||
| Rotation Speed (0-100%) | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | |
| End Process (Yes) | Yes |