Difference between revisions of "Lesker PVD75 E-beam Evaporator"
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== Description == | == Description == | ||
| − | The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd via e-beam evaporation. | + | ===== The tool ===== |
| + | The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd via e-beam evaporation. The tool also comes with a load-lock system, allowing for fast and easy transfer of samples in and out of the system. | ||
| + | ===== Available materials ===== | ||
| + | The tool contains the following materials: | ||
| − | + | * Au - Gold | |
| − | * | + | * Cr - Chromium |
| − | * Cr | + | * Pd - Palladium |
| − | * | + | * Ti - Titanium |
| − | * | + | |
| + | Deposition is limited to thin-film thicknesses of ~100 nm. | ||
== Resources == | == Resources == | ||
Revision as of 08:43, 14 September 2022
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| Tool Name | Lesker PVD75 E-Beam/Thermal Evaporator |
|---|---|
| Instrument Type | Deposition |
| Staff Manager | Jason (jarohr@seas.upenn.edu) |
| Lab Location | Bay 2 |
| Tool Manufacturer | Kurt J. Lesker |
| Tool Model | PVD75 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 8-9748 |
| SOP Link | SOP |
Description
The tool
The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd via e-beam evaporation. The tool also comes with a load-lock system, allowing for fast and easy transfer of samples in and out of the system.
Available materials
The tool contains the following materials:
- Au - Gold
- Cr - Chromium
- Pd - Palladium
- Ti - Titanium
Deposition is limited to thin-film thicknesses of ~100 nm.
Resources
Training video
Link: PVD-4 Training Video
SOPs & Troubleshooting
Link: QNF SOP