Difference between revisions of "Jupiter II RIE Plasma Etcher"

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| Tool_Model = Jupiter II
 
| Tool_Model = Jupiter II
 
| Iris_Designation = DE-08
 
| Iris_Designation = DE-08
| Lab_Phone = XXXXX
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| Lab_Phone = 215-898-9748
 
| SOP Link = [https://www.seas.upenn.edu/~nanosop/JupiterII.htm SOP]
 
| SOP Link = [https://www.seas.upenn.edu/~nanosop/JupiterII.htm SOP]
 
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Revision as of 14:49, 5 May 2022


Jupiter II RIE Plasma Etcher
DE-08.jpeg
Tool Name Jupiter II RIE Plasma Etcher
Instrument Type Etch
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer March
Tool Model Jupiter II
NEMO Designation {{{NEMO_Designation}}}
Lab Phone 215-898-9748
SOP Link SOP

Description

The March Jupiter II is a reactive ion etcher configured with O2 gas. The system is typically used as a plasma asher/cleaner.

Applications
  • Removal of photoresist
  • Removal of organic materials


Resources

SOPs & Troubleshooting