Difference between revisions of "Process Resources"
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= General Process Documents= | = General Process Documents= | ||
* [https://www.youtube.com/watch?v=WSbXpLe6_fE Video - How to Make Chips with Nanofabrication] | * [https://www.youtube.com/watch?v=WSbXpLe6_fE Video - How to Make Chips with Nanofabrication] | ||
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= Lithography = | = Lithography = | ||
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* [[Ancillary Process Chemicals at QNF]] -- Under Construction | * [[Ancillary Process Chemicals at QNF]] -- Under Construction | ||
* [[How to Make a Mask]] -- Under Construction | * [[How to Make a Mask]] -- Under Construction | ||
| + | * [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | ||
= Film Characterization= | = Film Characterization= | ||
Revision as of 14:52, 14 January 2025
General Process Documents
Lithography
- Resists at QNF
- Developers at QNF -- Under Construction
- Ancillary Process Chemicals at QNF -- Under Construction
- How to Make a Mask -- Under Construction
- KemLab Resist Presentation
Film Characterization
- Deposition and Etch Characterization of LPCVD SiNx thin films
- ALD deposition of SiO2 using BDEAS and Ozone precursors