Difference between revisions of "Process Resources"
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= General Process Documents= | = General Process Documents= | ||
| + | * [https://www.youtube.com/watch?v=WSbXpLe6_fE Video - How to Make Chips with Nanofabrication] | ||
* [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | * [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | ||
Revision as of 11:39, 13 January 2025
General Process Documents
Lithography
- Resists at QNF
- Developers at QNF -- Under Construction
- Ancillary Process Chemicals at QNF -- Under Construction
- How to Make a Mask -- Under Construction
Film Characterization
- Deposition and Etch Characterization of LPCVD SiNx thin films
- ALD deposition of SiO2 using BDEAS and Ozone precursors