Difference between revisions of "Process Resources"
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= General Process Documents= | = General Process Documents= | ||
| + | * [https://www.youtube.com/watch?v=WSbXpLe6_fE Video - How to Make Chips with Nanofabrication] | ||
| + | * [[How plasma etch works]] | ||
| + | * [[Au (gold) | Processing - Au]] | ||
| + | * [[SiO2 (silicon dioxide) | Processing - SiO2]] | ||
| + | * [[Ti (titanium) | Processing - Ti]] | ||
| + | |||
| + | = Lithography = | ||
| + | * [[How to Make a Mask]] | ||
| + | * [[Resists at QNF]] | ||
| + | * [[Developers at QNF]] -- Under Construction | ||
| + | * [[Ancillary Process Chemicals at QNF]] -- Under Construction | ||
* [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | * [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | ||
Latest revision as of 15:09, 14 January 2025
General Process Documents
- Video - How to Make Chips with Nanofabrication
- How plasma etch works
- Processing - Au
- Processing - SiO2
- Processing - Ti
Lithography
- How to Make a Mask
- Resists at QNF
- Developers at QNF -- Under Construction
- Ancillary Process Chemicals at QNF -- Under Construction
- KemLab Resist Presentation
Film Characterization
- Deposition and Etch Characterization of LPCVD SiNx thin films
- ALD deposition of SiO2 using BDEAS and Ozone precursors