Difference between revisions of "Quattrone Nanofabrication Facility"

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| Established = 2013
 
| Established = 2013
 
| Director = Eric Johnston
 
| Director = Eric Johnston
| Website = https://www.nano.upenn.edu/
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| Website = https://www.nano.upenn.edu/resources/quattrone-nanofabrication/
 
}}
 
}}
  
== About the facility ==
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== About ==
The Quattrone Nanofabrication Facility (QNF), located at the Krishna P. Singh Center for Nanotechnology at the University of Pennsylvania, is a a 10,000 ft<sup>2</sup> controlled-environment cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet processing, metrology, and device characterization. The facility is managed by full-time technical staff and available for use by researchers at the University of Pennsylvania and other academic, government and industrial institutions. By providing core nanofabrication capabilities, our mission is to enable research and development across a broad spectrum of areas. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale.
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The '''Quattrone Nanofabrication Facility (QNF)''' is a a 10,000 ft<sup>2</sup> controlled-environment cleanroom with leading-edge equipment capable of [[Equipment#Lithography | electron-beam and optical lithography]], [[Equipment#Deposition| physical and chemical vapor deposition]], [[Equipment#Etch | dry and wet etch processing]], [[Equipment#Metrology_.26_characterization | metrology, and device characterization]]. The facility is managed by a dedicated team of full-time technical staff and available for use by researchers at the University of Pennsylvania and other academic, government and industrial institutions. By providing core nanofabrication capabilities, our mission is to enable research and development across a broad spectrum of areas. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale.
  
== Equipment ==
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== Access ==
* '''[[Equipment | QNF Equipment List]]:''' Find resources for any given instrument (e.g. SOPs, troubleshooting, presentations, manuals, videos, specifications)
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Instructions for gaining access to the QNF can be found '''[[Join | here]]'''.
* '''[[General Equipment Information | General Equipment Information]]'''
 
* '''[https://iris.nano.upenn.edu/ Equipment Reservations]:''' Go to the QNF's ''IRIS'' site to make reservations to use the equipment
 
*'''[[QNF Equipment Owner Matrix | QNF Equipment Owner Matrix]]'''
 
  
== Available Resources ==
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After QNF access is granted, go to [[NEMO Help]] for information on getting started.
This lab site contains resources that are meant to maximize our users' ability to be safe, informed, productive QNF lab members. We also welcome non-QNF members to learn about our lab and make use of any resources provided on this site.  
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<!-- Commenting out for now... == [[QNF Staff | Staff]] == -->
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== [[Equipment | Equipment]] ==
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Find resources for any given instrument (e.g. SOPs, troubleshooting, presentations, manuals, videos, specifications). Go to [[NEMO Help | NEMO]] to request training and make reservations to use the equipment.
  
* '''[[Process Resources| Process Resources]]'''
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== [https://calendar.google.com/calendar/u/0/appointments/schedules/AcZssZ07h696qPBWZxoqznJzKcAYdYOtV1erDu6WhEqPX4jgGaFvncMeLsK3enTyca3R755LC1uevwZf Open Forum] ==
* '''[https://www.youtube.com/channel/UCZ2oRPqjGNFS8AJRWk59bgg/videos QNF YouTube Channel]:''' Video tutorials, which are also linked to from individual instrument pages
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Weekly office hours with all available QNF Process Staff in attendance to answer questions.
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*Get approval for setup in the QNF as a new user
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*Discuss needs for new projects as existing user
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*Brainstorm unexpected obstacles in your process
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== Resources ==
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* '''[[Process Resources| Materials & Chemicals]]'''
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* '''[[Safety Resources| Safety at QNF]]'''
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*'''[https://www.fabublox.com/group/69904cf3-7df5-4136-aaf0-5eef6ee69603 FabuBlox]'''
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* '''[https://www.youtube.com/watch?v=WSbXpLe6_fE How to Make Chips with Nanofabrication]''' - '''[https://www.youtube.com/channel/UCZ2oRPqjGNFS8AJRWk59bgg/videos QNF on YouTube]'''
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<!-- Commenting out to simplify landing page
 
* '''[https://www.nano.upenn.edu/resources/quattrone-nanofabrication/ QNF Website]:''' Official information on QNF programs, research, publications, and news
 
* '''[https://www.nano.upenn.edu/resources/quattrone-nanofabrication/ QNF Website]:''' Official information on QNF programs, research, publications, and news
* '''[Mailto:ericdj@seas.upenn.edu Suggestion Box]:''' Please send all SUGGESTIONS to help improve the QNF Lab to Eric Johnston.
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* '''[Mailto:ericdj@seas.upenn.edu Suggestion Box]:''' Please send all SUGGESTIONS to help improve the QNF Lab to Eric Johnston.-->
 
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* '''[[NEMO Help]]'''
== New Membership ==
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* '''[[Frequently_Asked_Questions | FAQ]]'''
To become a QNF lab member, see the information and forms provided on our [[Join | Join Page]].
 
 
 
== QNF Staff ==
 
[[QNF Staff | QNF Staff List & Contact Info]]
 

Latest revision as of 16:04, 28 July 2025


Quattrone Nanofabrication Facility
Nanofab Hallway.jpeg
A look inside the QNF cleanroom
Home Institution University of Pennsylvania
Location Philadelphia, PA
Building Krishna P. Singh Center for Nanotechnology
Established 2013
Director Eric Johnston
Website https://www.nano.upenn.edu/resources/quattrone-nanofabrication/

About

The Quattrone Nanofabrication Facility (QNF) is a a 10,000 ft2 controlled-environment cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet etch processing, metrology, and device characterization. The facility is managed by a dedicated team of full-time technical staff and available for use by researchers at the University of Pennsylvania and other academic, government and industrial institutions. By providing core nanofabrication capabilities, our mission is to enable research and development across a broad spectrum of areas. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale.

Access

Instructions for gaining access to the QNF can be found here.

After QNF access is granted, go to NEMO Help for information on getting started.

Equipment

Find resources for any given instrument (e.g. SOPs, troubleshooting, presentations, manuals, videos, specifications). Go to NEMO to request training and make reservations to use the equipment.

Open Forum

Weekly office hours with all available QNF Process Staff in attendance to answer questions.

  • Get approval for setup in the QNF as a new user
  • Discuss needs for new projects as existing user
  • Brainstorm unexpected obstacles in your process

Resources