Difference between revisions of "Process Resources"
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| + | = General Process Documents= | ||
| + | * [https://www.youtube.com/watch?v=WSbXpLe6_fE Video - How to Make Chips with Nanofabrication] | ||
| + | * [[How plasma etch works]] | ||
| + | * [[Au (gold) | Processing - Au]] | ||
| + | * [[SiO2 (silicon dioxide) | Processing - SiO2]] | ||
| + | * [[Ti (titanium) | Processing - Ti]] | ||
| + | |||
| + | = Lithography = | ||
| + | * [[How to Make a Mask]] | ||
| + | * [[Resists at QNF]] | ||
| + | * [[Developers at QNF]] -- Under Construction | ||
| + | * [[Ancillary Process Chemicals at QNF]] -- Under Construction | ||
| + | * [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation] | ||
| + | |||
| + | = Film Characterization= | ||
| + | * [https://upenn.app.box.com/file/1004242723681 Deposition and Etch Characterization of LPCVD SiNx thin films] | ||
| + | * [https://upenn.app.box.com/file/1004880785762 ALD deposition of SiO2 using BDEAS and Ozone precursors] | ||
| + | |||
= Soft Lithography = | = Soft Lithography = | ||
| − | [https://upenn.box.com/s/b6e694cf6r5qul32cmsjkbr9oydc6d7o Course Material for the QNF Soft Lithography Workshop] | + | * [https://upenn.box.com/s/b6e694cf6r5qul32cmsjkbr9oydc6d7o Course Material for the QNF Soft Lithography Workshop] |
| − | * Training | + | * [https://upenn.box.com/s/xrlkb6agcqae7ietb16mk5d84zqbcbr0 PDF Presentation for Biological Researchers] |
| + | * [https://upenn.box.com/s/10wkjldwrt3f6it5ted0jo74b72eu0m4 PDF Presentation for ESE 536] | ||
| + | * Training Videos | ||
| + | :* [https://www.youtube.com/watch?v=ybFHtd2pPYs Training Video - Spin Coating Thick Resist] | ||
| + | :* [https://www.youtube.com/watch?v=cRzLljt0VLs Training Video - Use of MA-03, ABM Mask Aligner] | ||
| + | :* [https://www.youtube.com/watch?v=SCs87pYIn5w Training Video - Negative Resist First Mask Alignment Mark] | ||
| + | :* [https://www.youtube.com/watch?v=Wzrsv_01ZNE Training Video - Developing SU8 Resist] | ||
| + | :* [https://www.youtube.com/watch?v=powcV3r4IhM Training Video - Degassing PDMS] | ||
Latest revision as of 15:09, 14 January 2025
General Process Documents
- Video - How to Make Chips with Nanofabrication
- How plasma etch works
- Processing - Au
- Processing - SiO2
- Processing - Ti
Lithography
- How to Make a Mask
- Resists at QNF
- Developers at QNF -- Under Construction
- Ancillary Process Chemicals at QNF -- Under Construction
- KemLab Resist Presentation
Film Characterization
- Deposition and Etch Characterization of LPCVD SiNx thin films
- ALD deposition of SiO2 using BDEAS and Ozone precursors