Difference between revisions of "Tousimis Critical Point Dryer"
Jump to navigation
Jump to search
m |
|||
| Line 1: | Line 1: | ||
| − | [[Category:Wet Processing]] | + | [[Category:Wet Processing]][[Category:Equipment]] |
{{EquipmentInfo | {{EquipmentInfo | ||
Latest revision as of 12:55, 28 July 2025
| Tool Name | Tousimis Critical Point Dryer |
|---|---|
| Instrument Type | Wet Processing |
| Staff Manager | Travis Venables |
| Lab Location | Bay 3 |
| Tool Manufacturer | Tousimis |
| Tool Model | 931-C |
| NEMO Designation | CPD-01 |
| Nearest Phone | XXXXX |
| SOP Link | SOP |
Description
The system enables drying of delicate samples through the use of liquid carbon dioxide as a transitional fluid which has zero surface tension at the critical point (1072 psi at 31 C). The tool can process pieces up to several 100 mm substrates.
Applications
- Carbon dioxide (CO2) drying after release of bulk or surface micromachined devices