Difference between revisions of "Lesker PVD75 E-beam Evaporator"
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(Created page with "Category:Deposition {{EquipmentInfo | name = Lesker PVD75 E-Beam/Thermal Evaporator | Tool_Name = Lesker PVD75 E-Beam/Thermal Evaporator | image = Image:PVD-04.jpeg|300...") |
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| image = [[Image:PVD-04.jpeg|300px]] | | image = [[Image:PVD-04.jpeg|300px]] | ||
| imagecaption = | | imagecaption = | ||
− | | Instrument_Type = | + | | Instrument_Type = Physical vapor deposition |
− | | Staff_Manager = David Barth | + | | Staff_Manager = [[David Barth | David Barth]] |
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| Tool_Manufacturer = Kurt J. Lesker | | Tool_Manufacturer = Kurt J. Lesker | ||
| Tool_Model = PVD75 | | Tool_Model = PVD75 | ||
− | | | + | | NEMO_Designation = PVD-04 |
− | | Lab_Phone = | + | | Lab_Phone = 215-898-9748 |
| SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | | SOP Link = [https://www.seas.upenn.edu/~nanosop/PVD75_e-beam_SOP.htm SOP] | ||
}} | }} | ||
== Description == | == Description == | ||
− | The Kurt J. Lesker | + | ===== The tool ===== |
+ | The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd. The tool also comes with a load-lock, allowing for fast and easy transfer of samples in and out of the system. While less flexible than the [[Lesker PVD75 E-Beam/Thermal Evaporator | PVD-02]] deposition system in terms of available materials, the PVD-04 is a much faster tool. | ||
− | The | + | ===== Available materials ===== |
+ | The tool contains the following materials: | ||
+ | * Au - Gold | ||
+ | * Cr - Chromium | ||
+ | * Pd - Palladium | ||
+ | * Ti - Titanium | ||
− | + | Deposition is limited to thin-film thicknesses of ~100 nm. | |
− | |||
− | |||
== Resources == | == Resources == | ||
− | [https://www.youtube.com/watch?v=OxkmP7Lr9Lo PVD-4 Training Video] | + | ===== Training video ===== |
+ | Link: [https://www.youtube.com/watch?v=OxkmP7Lr9Lo PVD-4 Training Video] | ||
===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
− | + | ||
+ | Link: [https://repository.upenn.edu/scn_sop/23/ SOP] | ||
+ | |||
+ | <pdf height="800">File:PVD_04_SOP.pdf</pdf> |
Latest revision as of 09:46, 16 May 2024
Tool Name | Lesker PVD75 E-Beam/Thermal Evaporator |
---|---|
Instrument Type | Physical vapor deposition |
Staff Manager | David Barth |
Lab Location | Bay 2 |
Tool Manufacturer | Kurt J. Lesker |
Tool Model | PVD75 |
NEMO Designation | PVD-04 |
Lab Phone | 215-898-9748 |
SOP Link | SOP |
Description
The tool
The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd. The tool also comes with a load-lock, allowing for fast and easy transfer of samples in and out of the system. While less flexible than the PVD-02 deposition system in terms of available materials, the PVD-04 is a much faster tool.
Available materials
The tool contains the following materials:
- Au - Gold
- Cr - Chromium
- Pd - Palladium
- Ti - Titanium
Deposition is limited to thin-film thicknesses of ~100 nm.
Resources
Training video
Link: PVD-4 Training Video
SOPs & Troubleshooting
Link: SOP