Difference between revisions of "Filmetrics F50 (White Light)"

From Quattrone Nanofabrication Facility
Jump to navigation Jump to search
 
Line 8: Line 8:
 
| Instrument_Type = Metrology
 
| Instrument_Type = Metrology
 
| Staff_Manager = [[David Barth | David Barth]]
 
| Staff_Manager = [[David Barth | David Barth]]
| Lab_Location = Bay 2
+
| Lab_Location = Cleanroom Corridor
 
| Tool_Manufacturer = Filmetrics
 
| Tool_Manufacturer = Filmetrics
 
| Tool_Model = F50
 
| Tool_Model = F50

Latest revision as of 10:45, 28 June 2024


Filmetrics F50 (White Light)
MET-11.jpeg
Tool Name Filmetrics F50 (White Light)
Instrument Type Metrology
Staff Manager David Barth
Lab Location Cleanroom Corridor
Tool Manufacturer Filmetrics
Tool Model F50
NEMO Designation MET-11
Lab Phone XXXXX
SOP Link SOP

Description

The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 200mm in diameter.

Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.

Applications
  • Thin-film thickness optical measurements

Resources

SOPs & Troubleshooting