Difference between revisions of "CEE Apogee Spinner"
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| − | [[Category:Lithography]] | + | [[Category:Lithography]][[Category:Resist Coating]][[Category:Equipment]] |
{{EquipmentInfo | {{EquipmentInfo | ||
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| NEMO_Designation = SPN-01, -03, -06, -08, -09 | | NEMO_Designation = SPN-01, -03, -06, -08, -09 | ||
| Lab_Phone = | | Lab_Phone = | ||
| − | | SOP Link = [ | + | | SOP Link = [[Media:SPN-xx SOP v06.pdf | SOP]] |
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===== SOPs ===== | ===== SOPs ===== | ||
| − | * | + | * [[Media:SPN-xx SOP v06.pdf | SOP for all QNF Apogee Spinners]] |
* Video - [https://www.youtube.com/watch?v=stA2ujjcB7o Manual Dispense] | * Video - [https://www.youtube.com/watch?v=stA2ujjcB7o Manual Dispense] | ||
* Video - [https://www.youtube.com/watch?v=W3kV4bNnCYo Centering Device] | * Video - [https://www.youtube.com/watch?v=W3kV4bNnCYo Centering Device] | ||
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*[https://www.costeffectiveequipment.com/blog-spin-coat-theory/ Overview - CEE] | *[https://www.costeffectiveequipment.com/blog-spin-coat-theory/ Overview - CEE] | ||
*[https://www.costeffectiveequipment.com/blog-selecting-maximum-spin-speed-and-acceleration/ Choosing Spin Speed - CEE] | *[https://www.costeffectiveequipment.com/blog-selecting-maximum-spin-speed-and-acceleration/ Choosing Spin Speed - CEE] | ||
| − | + | <br> | |
===== Troubleshooting ===== | ===== Troubleshooting ===== | ||
| − | + | ======Process Issues====== | |
| − | ======Process Issues ====== | ||
*[https://www.costeffectiveequipment.com/blog-cotton-candy-effect/ The Cotton Candy Effect - CEE] | *[https://www.costeffectiveequipment.com/blog-cotton-candy-effect/ The Cotton Candy Effect - CEE] | ||
| − | ======Vacuum Issues ====== | + | ======Vacuum Issues====== |
Have you: | Have you: | ||
*Confirmed your chuck size is correct for your substrate? | *Confirmed your chuck size is correct for your substrate? | ||
Latest revision as of 09:21, 26 August 2025
| Tool Name | CEE Apogee Spinner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bays 4, 5 & 6 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-01, -03, -06, -08, -09 |
| Nearest Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoaters are located in Bays 4, 5 and 6. Control of ramp rate and speed. Includes wafer centering step. *HMDS spin-on is not allowed outside of SPN-04*
Select SPN-01 when submitting training request on NEMO. Share specific process information in the description.
Allowed Materials
SPN-01: Acetone compatible/soluble resists only – S18xx, SPR 220-x, AZ series, KL series, K-Pro. No LOR, PMGI or Polyimide!
SPN-03: LOR, PMGI, Polyimide
SPN-06: E-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No LOR, PMGI or Polyimide!
SPN-08: Negative epoxy resists only - SU8, HARE SQ
SPN-09: PDMS
Resources
SOPs
- SOP for all QNF Apogee Spinners
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly
About spin-coating
Troubleshooting
Process Issues
Vacuum Issues
Have you:
- Confirmed your chuck size is correct for your substrate?
- Checked the chuck base is properly screwed on, if the base is needed?
- Checked that all o-rings are installed, if needed?
- Checked the chuck for residue?
- Checked that the chuck was installed on the spindle correctly?
Vacuum should be met when the correct chuck size is chosen and chuck/base seal correctly. See above resources for more info. For piece parts, carefully screw on the base, don't cross the threads! Also make sure to screw as tightly as the chuck allows, but not further. These parts are plastic and can easily deteriorate if abused.