Difference between revisions of "Jupiter II RIE Plasma Etcher"
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| − | [[Category:Etch]] | + | [[Category:Etch]][[Category:Plasma Etch]][[Category:Equipment]] |
{{EquipmentInfo | {{EquipmentInfo | ||
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| Instrument_Type = Etch | | Instrument_Type = Etch | ||
| − | | Staff_Manager = [[ | + | | Staff_Manager = [[Lucas Barreto | Lucas Barreto]] |
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| Tool_Manufacturer = March | | Tool_Manufacturer = March | ||
Latest revision as of 15:54, 25 July 2025
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| Tool Name | Jupiter II RIE Plasma Etcher |
|---|---|
| Instrument Type | Etch |
| Staff Manager | Lucas Barreto |
| Lab Location | Bay 2 |
| Tool Manufacturer | March |
| Tool Model | Jupiter II |
| NEMO Designation | DE-08 |
| Nearest Phone | 215-898-9748 |
| SOP Link | SOP |
Description
The March Jupiter II is a reactive ion etcher configured with O2 gas. The system is typically used as a plasma asher/cleaner.
Applications
- Removal of photoresist
- Removal of organic materials