Difference between revisions of "Quattrone Nanofabrication Facility"
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== About == | == About == | ||
| − | The '''Quattrone Nanofabrication Facility (QNF)''' is a a 10,000 ft<sup>2</sup> controlled-environment cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet processing, metrology, and device characterization. The facility is managed by full-time technical staff and available for use by researchers at the University of Pennsylvania and other academic, government and industrial institutions. By providing core nanofabrication capabilities, our mission is to enable research and development across a broad spectrum of areas. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale. | + | The '''Quattrone Nanofabrication Facility (QNF)''' is a a 10,000 ft<sup>2</sup> controlled-environment cleanroom with leading-edge equipment capable of [[Equipment#Lithography | electron-beam and optical lithography]], [[Equipment#Deposition| physical and chemical vapor deposition]], [[Equipment#Etch | dry and wet etch processing]], [[Equipment#Metrology_.26_characterization | metrology, and device characterization]]. The facility is managed by full-time technical staff and available for use by researchers at the University of Pennsylvania and other academic, government and industrial institutions. By providing core nanofabrication capabilities, our mission is to enable research and development across a broad spectrum of areas. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale. |
== [[QNF Staff | Staff]] == | == [[QNF Staff | Staff]] == | ||
Revision as of 13:44, 25 July 2025
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| A look inside the QNF cleanroom | |
| Home Institution | University of Pennsylvania |
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| Location | Philadelphia, PA |
| Building | Krishna P. Singh Center for Nanotechnology |
| Established | 2013 |
| Director | Eric Johnston |
| Website | https://www.nano.upenn.edu/resources/quattrone-nanofabrication/ |
About
The Quattrone Nanofabrication Facility (QNF) is a a 10,000 ft2 controlled-environment cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet etch processing, metrology, and device characterization. The facility is managed by full-time technical staff and available for use by researchers at the University of Pennsylvania and other academic, government and industrial institutions. By providing core nanofabrication capabilities, our mission is to enable research and development across a broad spectrum of areas. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale.
Staff
Equipment
Find resources for any given instrument (e.g. SOPs, troubleshooting, presentations, manuals, videos, specifications). Go to NEMO to request training and make reservations to use the equipment.
Open Forum
Weekly office hours with all available QNF Process Staff in attendance to answer questions.
- Get approval for setup in the QNF as a new user
- Discuss needs for new projects as existing user
- Brainstorm unexpected obstacles in your process