Difference between revisions of "CEE 200X Spinner"
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(update tool owner, update to NEMO) |
m (Coana moved page Spinner - SU-8/PDMS to CEE 200X Spinner: No longer used for Soft Lithography, being kept for surface protection/coating at 'Cut & Connect') |
Revision as of 14:54, 12 March 2024
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| Tool Name | Spinner - SU8/PDMS |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Soft Lithography |
| Tool Manufacturer | CEE |
| Tool Model | 200X |
| NEMO Designation | SPN-07 |
| Lab Phone | 3-9639 |
| SOP Link | SOP |
Description
Spinner for coating substrates with thicker resists as well as PDMS. Control of ramp rate and speed. Includes wafer centering step.