Difference between revisions of "W master recipe"
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> [[Denton_Explorer14_Magnetron_Sputterer#Process_data_&_master_recipes | Click here to return to PVD-05]] < | > [[Denton_Explorer14_Magnetron_Sputterer#Process_data_&_master_recipes | Click here to return to PVD-05]] < | ||
| − | Step | + | Step T010 is the deposition step. |
{| class="wikitable" | {| class="wikitable" | ||
| Line 7: | Line 7: | ||
|- | |- | ||
|- | |- | ||
| − | | Step Time (sec) || 5 || | + | | Step Time (sec) || 5 || 60 || 60 || 60 || 60 || 60 || 60 || 60 || 60 || 60 || [dep] || 200 || 5 |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| Min Vacuum Setpoint (Torr) || || || || || || || || || || || || || | | Min Vacuum Setpoint (Torr) || || || || || || || || || || || || || | ||
| Line 13: | Line 13: | ||
| || || || || || || || || || || || || || | | || || || || || || || || || || || || || | ||
|-style="background-color:#DBFEFF" | |-style="background-color:#DBFEFF" | ||
| − | | Gas - (PID or Fixed) || || PID || PID || PID || PID || PID || PID || PID || PID || PID || PID || | + | | Gas - (PID or Fixed) || || PID || PID || PID || PID || PID || PID || PID || PID || PID || PID || || |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| − | | Gas - PID Master Gas Select || || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || | + | | Gas - PID Master Gas Select || || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || || |
|- | |- | ||
| − | | Gas1 - Setpoint (sccm) || || | + | | Gas1 - Setpoint (sccm) || || 30 || 30 || 30 || 30 || 30 || 30 || 30 || 30 || 30 || 30 || || |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| Gas2 - Setpoint (sccm) || || || || || || || || || || || || || | | Gas2 - Setpoint (sccm) || || || || || || || || || || || || || | ||
| Line 23: | Line 23: | ||
| || || || || || || || || || || || || || | | || || || || || || || || || || || || || | ||
|-style="background-color:#DEB4DC" | |-style="background-color:#DEB4DC" | ||
| − | |Gas PID Pressure (mTorr) || || | + | |Gas PID Pressure (mTorr) || || 30 || 25 || 20 || 15 || 12 || 10 || 8 || 6 || 4 || 3 || || |
|-style="background-color:#DCF5E9" | |-style="background-color:#DCF5E9" | ||
| RF Source - Sputter (Watts) || || || || || || || || || || || || || | | RF Source - Sputter (Watts) || || || || || || || || || || || || || | ||
| Line 31: | Line 31: | ||
| RF Source - Shutter || || || || || || || || || || || || || | | RF Source - Shutter || || || || || || || || || || || || || | ||
|-style="background-color:#ECFA6F" | |-style="background-color:#ECFA6F" | ||
| − | | DC 1 Source - Sputter (Watts) || || | + | | DC 1 Source - Sputter (Watts) || || 100 || 100 || 100 || 150 || 200 || 250 || 300 || 350 || 400 || 450 || || |
|-style="background-color:#ECFA6F" | |-style="background-color:#ECFA6F" | ||
| − | | DC 1 Source - Cathode Select || || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || | + | | DC 1 Source - Cathode Select || || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || 1 || || |
|-style="background-color:#ECFA6F" | |-style="background-color:#ECFA6F" | ||
| − | | DC 1 Source - Shutter || || || || || || || | + | | DC 1 Source - Shutter || || || || || || || || || || || Open || || |
|-style="background-color:#FAD86F" | |-style="background-color:#FAD86F" | ||
| DC 2 Source - Sputter (Watts) || || || || || || || || || || || || || | | DC 2 Source - Sputter (Watts) || || || || || || || || || || || || || | ||
| Line 43: | Line 43: | ||
| DC 2 Source - Shutter || || || || || || || || || || || || || | | DC 2 Source - Shutter || || || || || || || || || || || || || | ||
|-style="background-color:#6FD2FA" | |-style="background-color:#6FD2FA" | ||
| − | | Pressure Control (Throttle) || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || | + | | Pressure Control (Throttle) || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || Yes || || |
|-style="background-color:#FFFFFF" | |-style="background-color:#FFFFFF" | ||
| Ignition Pressure (mTorr) || || || || || || || || || || || || || | | Ignition Pressure (mTorr) || || || || || || || || || || || || || | ||
| Line 49: | Line 49: | ||
| || || || || || || || || || || || || || | | || || || || || || || || || || || || || | ||
|-style="background-color:#E8F213" | |-style="background-color:#E8F213" | ||
| − | | Rotation Speed (0-100%) || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || | + | | Rotation Speed (0-100%) || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || 50 || |
|- | |- | ||
| End Process (Yes) || || || || || || || || || || || || || Yes | | End Process (Yes) || || || || || || || || || || || || || Yes | ||
|} | |} | ||
Latest revision as of 13:39, 31 January 2023
> Click here to return to PVD-05 <
Step T010 is the deposition step.
| Step Number | T000 | T001 | T002 | T003 | T004 | T005 | T006 | T007 | T008 | T009 | T010 | T011 | T012 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Step Time (sec) | 5 | 60 | 60 | 60 | 60 | 60 | 60 | 60 | 60 | 60 | [dep] | 200 | 5 |
| Min Vacuum Setpoint (Torr) | |||||||||||||
| Gas - (PID or Fixed) | PID | PID | PID | PID | PID | PID | PID | PID | PID | PID | |||
| Gas - PID Master Gas Select | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | |||
| Gas1 - Setpoint (sccm) | 30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 | 30 | |||
| Gas2 - Setpoint (sccm) | |||||||||||||
| Gas PID Pressure (mTorr) | 30 | 25 | 20 | 15 | 12 | 10 | 8 | 6 | 4 | 3 | |||
| RF Source - Sputter (Watts) | |||||||||||||
| RF Source - Cathode Select | |||||||||||||
| RF Source - Shutter | |||||||||||||
| DC 1 Source - Sputter (Watts) | 100 | 100 | 100 | 150 | 200 | 250 | 300 | 350 | 400 | 450 | |||
| DC 1 Source - Cathode Select | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | |||
| DC 1 Source - Shutter | Open | ||||||||||||
| DC 2 Source - Sputter (Watts) | |||||||||||||
| DC 2 Source - Shutter | |||||||||||||
| Pressure Control (Throttle) | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | ||
| Ignition Pressure (mTorr) | |||||||||||||
| Rotation Speed (0-100%) | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | |
| End Process (Yes) | Yes |