Veeco Savannah 200

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Creating Veeco Savannah 200
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Tool Name Creating Veeco Savannah 200
Instrument Type Deposition
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer Veeco
Tool Model Savannah 200
NEMO Designation {{{NEMO_Designation}}}
Lab Phone XXXXX
SOP Link SOP

Description

Savannah is equipped with high-speed pneumatic pulse valves to enable our unique Exposure Mode for thin film deposition on Ultra High Aspect Ratio substrates. This proven precision thin film coating methodology can be used to deposit conformal, uniform films on substrates with aspect ratios of greater than > 2000:1. Savannah is capable of holding substrates of different sizes up to 200mm. The Savannah thin film deposition systems are equipped with Pd, Pt precursors, TMA, HfCl4, formalin and Ozone.

Films
  • Pt
  • Aluminum oxide
  • Pd
  • Under development: Hafnia (using HfCl4 and O3)

Resources

SOPs & Troubleshooting