Latest revision as of 15:23, 3 July 2023

General Process Documents

@@ Line 1: / Line 1: @@
+= General Process Documents=
+* [https://upenn.box.com/s/ol48q2o2pq7it1kn7spai87c9ene9cvs KemLab Resist Presentation]
+= Lithography =
+* [[Resists at QNF]]
+* [[Developers at QNF]] -- Under Construction]
+* [[Ancillary Process Chemicals at QNF]] -- Under Construction
+= Film Characterization=
+* [https://upenn.app.box.com/file/1004242723681 Deposition and Etch Characterization of LPCVD SiNx thin films]
+* [https://upenn.app.box.com/file/1004880785762 ALD deposition of SiO2 using BDEAS and Ozone precursors]
 = Soft Lithography =
 * [https://upenn.box.com/s/b6e694cf6r5qul32cmsjkbr9oydc6d7o Course Material for the QNF Soft Lithography Workshop]
-* Training video - Spin coating thick resist [https://www.youtube.com/watch?v=ybFHtd2pPYs Video]
+* [https://upenn.box.com/s/xrlkb6agcqae7ietb16mk5d84zqbcbr0 PDF Presentation for Biological Researchers]
+* [https://upenn.box.com/s/10wkjldwrt3f6it5ted0jo74b72eu0m4 PDF Presentation for ESE 536]
+* Training Videos
+:* [https://www.youtube.com/watch?v=ybFHtd2pPYs Training Video - Spin Coating Thick Resist]
+:* [https://www.youtube.com/watch?v=cRzLljt0VLs Training Video - Use of MA-03, ABM Mask Aligner]
+:* [https://www.youtube.com/watch?v=SCs87pYIn5w Training Video - Negative Resist First Mask Alignment Mark]
+:* [https://www.youtube.com/watch?v=Wzrsv_01ZNE Training Video - Developing SU8 Resist]
+:* [https://www.youtube.com/watch?v=powcV3r4IhM Training Video - Degassing PDMS]