KLA Tencor P7 2D&3D/stress profilometer

From Quattrone Nanofabrication Facility
Revision as of 13:33, 2 May 2022 by Dsbarth (talk | contribs) (Changed protection level for "KLA Tencor P7 2D&3D/stress profilometer" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite)))
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search

KLA Tencor P7 2D&3D/stress profilometer
Tool Name KLA Tencor P7 2D&3D/stress profilometer
Instrument Type Metrology
Staff Manager Sam Azadi
Lab Location Bay 2
Tool Manufacturer KLA
Tool Model P7
Iris Designation MET-02
Lab Phone XXXXX


The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.

  • Film step height measurements
  • Photo resist thickness
  • Etched trench depth
  • Materials characterization for surface roughness and waviness
  • Wafer bow / stress measurements


SOPs & Troubleshooting