Difference between revisions of "KLA Tencor P7 2D&3D/stress profilometer"
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m (Changed protection level for "KLA Tencor P7 2D&3D/stress profilometer" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite))) |
(update tool owner, update to NEMO) |
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| imagecaption = | | imagecaption = | ||
| Instrument_Type = Metrology | | Instrument_Type = Metrology | ||
| − | | Staff_Manager = | + | | Staff_Manager = [[David Barth | David Barth]] |
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| Tool_Manufacturer = KLA | | Tool_Manufacturer = KLA | ||
| Tool_Model = P7 | | Tool_Model = P7 | ||
| − | | | + | | NEMO_Designation = MET-02 |
| Lab_Phone = XXXXX | | Lab_Phone = XXXXX | ||
| SOP Link = [https://repository.upenn.edu/scn_sop/13/ SOP] | | SOP Link = [https://repository.upenn.edu/scn_sop/13/ SOP] | ||
Latest revision as of 14:18, 3 January 2024
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| Tool Name | KLA Tencor P7 2D&3D/stress profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Bay 2 |
| Tool Manufacturer | KLA |
| Tool Model | P7 |
| NEMO Designation | MET-02 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.
Applications
- Film step height measurements
- Photo resist thickness
- Etched trench depth
- Materials characterization for surface roughness and waviness
- Wafer bow / stress measurements