Difference between revisions of "Jupiter II RIE Plasma Etcher"
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| imagecaption = | | imagecaption = | ||
| Instrument_Type = Etch | | Instrument_Type = Etch | ||
| − | | Staff_Manager = | + | | Staff_Manager = Kyle Keenan |
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| Tool_Manufacturer = March | | Tool_Manufacturer = March | ||
Revision as of 10:53, 25 April 2023
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| Tool Name | Jupiter II RIE Plasma Etcher |
|---|---|
| Instrument Type | Etch |
| Staff Manager | Kyle Keenan |
| Lab Location | Bay 2 |
| Tool Manufacturer | March |
| Tool Model | Jupiter II |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 215-898-9748 |
| SOP Link | SOP |
Description
The March Jupiter II is a reactive ion etcher configured with O2 gas. The system is typically used as a plasma asher/cleaner.
Applications
- Removal of photoresist
- Removal of organic materials