Difference between revisions of "Filmetrics F50 (UV Filter)"
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(Created page with "Category:Metrology {{EquipmentInfo | name = Filmetrics F50 (UV Filter) | Tool_Name = Filmetrics F50 (UV Filter) | image = 300px | imagecaption = |...") |
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| Instrument_Type = Metrology | | Instrument_Type = Metrology | ||
− | | Staff_Manager = | + | | Staff_Manager = [[David Barth | David Barth]] |
| Lab_Location = Bay 2 | | Lab_Location = Bay 2 | ||
| Tool_Manufacturer = Filmetrics | | Tool_Manufacturer = Filmetrics | ||
| Tool_Model = F50 | | Tool_Model = F50 | ||
− | | | + | | NEMO_Designation = MET-03 |
| Lab_Phone = XXXXX | | Lab_Phone = XXXXX | ||
| SOP Link = [https://repository.upenn.edu/scn_sop/15/ SOP] | | SOP Link = [https://repository.upenn.edu/scn_sop/15/ SOP] |
Latest revision as of 14:19, 3 January 2024
Tool Name | Filmetrics F50 (UV Filter) |
---|---|
Instrument Type | Metrology |
Staff Manager | David Barth |
Lab Location | Bay 2 |
Tool Manufacturer | Filmetrics |
Tool Model | F50 |
NEMO Designation | MET-03 |
Lab Phone | XXXXX |
SOP Link | SOP |
Description
The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 200mm in diameter. This system has a UV filter installed and is used for measuring film thicknesses of UV sensitive photoresists. A second F50 system without UV filters is located in the QNF (MET-11).
Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.
Applications
- Thin-film thickness optical measurements