Filmetrics F50 (UV Filter)
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| Tool Name | Filmetrics F50 (UV Filter) |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | Filmetrics |
| Tool Model | F50 |
| NEMO Designation | MET-03 |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 200mm in diameter. This system has a UV filter installed and is used for measuring film thicknesses of UV sensitive photoresists. A second F50 system without UV filters is located in the QNF (MET-11).
Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.
Applications
- Thin-film thickness optical measurements