File:RIE CF4 etch rate 2min SiN LPCVD 07292024.png

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Summary

LPCVD SiNx with CF4 in RIE

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	Date/Time	Thumbnail	Dimensions	User	Comment
current	13:33, 30 July 2024		1,296 × 1,000 (95 KB)	Azadi (talk \| contribs)	LPCVD SiNx with CF4 in RIE

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Horizontal resolution	37.79 dpc
Vertical resolution	37.79 dpc