Developers at QNF

From Quattrone Nanofabrication Facility
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The following are developers you may encounter in the QNF wet benches.

Name Distributor Composition Hazards Resist Compatibility Alternatives
TMAH 0.26N KL 0.26N TMAH (Metal Ion Free) Toxic, Irritant (can cause chemical burns, lethal for high surface areas) CD-26, AZ300MIF
AZ400K 1:4 Buffered Potassium Hydroxide/Borates (Metal Ion Bearing), 1:4 H2O Dilution Irritant
SU-8 Developer PGMEA (1-methoxy-2-propanol acetate) SU-8, HARE SQ, IP-Dip SQ Developer
SQ Developer KL PGMEA (1-methoxy-2-propanol acetate) HARE SQ, SU-8, IP-Dip SU-8 Developer