DMO MicroWriter ML3 Pro

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DMO MicroWriter ML3 Pro
DMO.jpg
Tool Name DMO MicroWriter ML3 Pro
Instrument Type Lithography
Staff Manager Dan Sabrsula
Lab Location Bay 5
Tool Manufacturer Durham Magneto Optics
Tool Model MicroWriter ML3 Pro
NEMO Designation LW-03
Nearest Phone
SOP Link SOP

Description

The ML3 Pro is a flexible direct-write lithography tool with two laser sources at 405 nm and 365 nm and a minimum feature size of 400 nm.

Resources

SOPs & Troubleshooting

Link: SOP

Process characterization and tool data
Application Notes