Au (gold)

From Quattrone Nanofabrication Facility
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Equipment

Deposition Equipment

Etching

Applications

Processes

Sputter Deposition Rates

PVD Tool Cathode 2 (DC; high mag) Recorded Cathode 3 (DC) Recorded Cathode 4 (DC; high mag) Recorded
Pressure Power Rate Pressure Power Rate Pressure Power Rate
PVD-03 4 mTorr 140 W 3.1 Å s-1 3 mTorr 140 W 2.5 Å s-1 03/06/23 5 mTorr 140 W 3.1 Å s-1
PVD Tool Cathode 1 & 3 (DC) Recorded
Pressure Power Rate
PVD-05 3 mTorr 140 W 4.6 Å s-1