Apogee Spinner - Positive Resist (Right)

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Apogee Spinner - Positive Resist (Right)
Tool Name Apogee Spinner - Positive Resist (Right)
Instrument Type Lithography
Staff Manager Ana Cohen
Lab Location Bay 5
Tool Manufacturer CEE
Tool Model Apogee
NEMO Designation SPN-03
Lab Phone
SOP Link SOP

Description

CEE Apogee spincoater located on right side of positive spin bench. For positive resists, including LOR, PMGI, Polyimide. Bilayer LOR process should be only done here.

Control of ramp rate and speed. Includes wafer centering step.

Use SPN-01 for submitting training request

Resources

SOPs & Troubleshooting
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