Difference between revisions of "Apogee Spinner - Positive Resist (Right)"
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===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
| − | * SOP: [https://nemo.nano.upenn.edu/media/tool_documents/spn-03/SPN- | + | * SOP: [https://nemo.nano.upenn.edu/media/tool_documents/spn-03/SPN-xx_SOP_v05.pdf SOP] |
* Video - [https://www.youtube.com/watch?v=stA2ujjcB7o Manual Dispense] | * Video - [https://www.youtube.com/watch?v=stA2ujjcB7o Manual Dispense] | ||
* Video - [https://www.youtube.com/watch?v=W3kV4bNnCYo Centering Device] | * Video - [https://www.youtube.com/watch?v=W3kV4bNnCYo Centering Device] | ||
* Video - [https://www.youtube.com/watch?v=vuMO7sb4a_c Chuck Installation] | * Video - [https://www.youtube.com/watch?v=vuMO7sb4a_c Chuck Installation] | ||
* Video - [https://www.youtube.com/watch?v=_iW3_ktbtFk Chuck Assembly] | * Video - [https://www.youtube.com/watch?v=_iW3_ktbtFk Chuck Assembly] | ||
Latest revision as of 12:20, 18 April 2024
| Tool Name | Apogee Spinner - Positive Resist (Right) |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 5 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-03 |
| Lab Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoater located on right side of positive spin bench. For positive resists, including LOR, PMGI, Polyimide. Bilayer LOR process should be only done here.
Control of ramp rate and speed. Includes wafer centering step.
Use SPN-01 for submitting training request
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly