Apogee Spinner - Positive Resist (Left)

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Apogee Spinner - Positive Resist (Left)
Tool Name Apogee Spinner - Positive Resist (Left)
Instrument Type Lithography
Staff Manager Ana Cohen
Lab Location Bay 5
Tool Manufacturer CEE
Tool Model Apogee
NEMO Designation SPN-01
Lab Phone
SOP Link SOP

Description

CEE Apogee spincoater located on left side of positive spin bench. For acetone compatible/soluble resists only – S18xx, SPR 220-x, AZ series, KL series, K-Pro. *No LOR, PMGI, Polyimide*

Control of ramp rate and speed. Includes wafer centering step.

Resources

SOPs & Troubleshooting
Retrieved from "https://wiki.nano.upenn.edu/wiki/index.php?title=Apogee_Spinner_-_Positive_Resist_(Left)&oldid=1340"