Apogee Spinner - E-Beam Resist

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Apogee Spinner - E-Beam Resist
Tool Name Apogee Spinner - E-Beam Resist
Instrument Type Lithography
Staff Manager Ana Cohen
Lab Location Bay 4
Tool Manufacturer CEE
Tool Model Apogee
NEMO Designation SPN-06
Lab Phone
SOP Link SOP

Description

CEE Apogee spincoater for e-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No PMGI or Polyimide

Control of ramp rate and speed. Includes wafer centering step.

Use SPN-01 for submitting training request

Resources

SOPs & Troubleshooting
Retrieved from "https://wiki.nano.upenn.edu/wiki/index.php?title=Apogee_Spinner_-_E-Beam_Resist&oldid=1343"