Difference between revisions of "Apogee Spinner - E-Beam Resist"
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| NEMO_Designation = SPN-06 | | NEMO_Designation = SPN-06 | ||
| Lab_Phone = | | Lab_Phone = | ||
| − | | SOP Link = [https://nemo.nano.upenn.edu/media/tool_documents/spn-06/SPN- | + | | SOP Link = [https://nemo.nano.upenn.edu/media/tool_documents/spn-06/SPN-xx_SOP_v05.pdf SOP] |
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===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
| − | * SOP: [https://nemo.nano.upenn.edu/media/tool_documents/spn-06/SPN- | + | * SOP: [https://nemo.nano.upenn.edu/media/tool_documents/spn-06/SPN-xx_SOP_v05.pdf SOP] |
* Video - [https://www.youtube.com/watch?v=stA2ujjcB7o Manual Dispense] | * Video - [https://www.youtube.com/watch?v=stA2ujjcB7o Manual Dispense] | ||
* Video - [https://www.youtube.com/watch?v=W3kV4bNnCYo Centering Device] | * Video - [https://www.youtube.com/watch?v=W3kV4bNnCYo Centering Device] | ||
* Video - [https://www.youtube.com/watch?v=vuMO7sb4a_c Chuck Installation] | * Video - [https://www.youtube.com/watch?v=vuMO7sb4a_c Chuck Installation] | ||
* Video - [https://www.youtube.com/watch?v=_iW3_ktbtFk Chuck Assembly] | * Video - [https://www.youtube.com/watch?v=_iW3_ktbtFk Chuck Assembly] | ||
Latest revision as of 12:20, 18 April 2024
| Tool Name | Apogee Spinner - E-Beam Resist |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 4 |
| Tool Manufacturer | CEE |
| Tool Model | Apogee |
| NEMO Designation | SPN-06 |
| Lab Phone | |
| SOP Link | SOP |
Description
CEE Apogee spincoater for e-beam resist only – PMMA A series, 1000 HARP series, ZEP520, HSQ. No PMGI or Polyimide
Control of ramp rate and speed. Includes wafer centering step.
Use SPN-01 for submitting training request
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video - Manual Dispense
- Video - Centering Device
- Video - Chuck Installation
- Video - Chuck Assembly