Difference between revisions of "ADT 7100 Dicing Saw"
Jump to navigation
Jump to search
(update area name from Soft Lithography) |
|||
| (12 intermediate revisions by 3 users not shown) | |||
| Line 7: | Line 7: | ||
| imagecaption = | | imagecaption = | ||
| Instrument_Type = Back End | | Instrument_Type = Back End | ||
| − | | Staff_Manager = Eric Johnston | + | | Staff_Manager = [[Eric Johnston | Eric Johnston]] |
| − | | Lab_Location = Singh | + | | Lab_Location = Singh 124 |
| Tool_Manufacturer = Advanced Dicing Technologies (ADT) | | Tool_Manufacturer = Advanced Dicing Technologies (ADT) | ||
| Tool_Model = 7122 | | Tool_Model = 7122 | ||
| − | | | + | | NEMO_Designation = BE-04 |
| Lab_Phone = none | | Lab_Phone = none | ||
| SOP Link = [https://repository.upenn.edu/scn_sop/17/ SOP] | | SOP Link = [https://repository.upenn.edu/scn_sop/17/ SOP] | ||
| Line 24: | Line 24: | ||
* Dicing of sapphire wafers | * Dicing of sapphire wafers | ||
| + | ===== Important Considerations ===== | ||
| + | * Main cause of broken blades is having the saw descend directly onto the sample. The solution to this is to make sure your sample is centered as much as possible, and to have 10mm of over travel. | ||
== Resources == | == Resources == | ||
ADT Contacts: | ADT Contacts: | ||
* Bob McCort (semi-retired): rmccort@adt-co.com | * Bob McCort (semi-retired): rmccort@adt-co.com | ||
| + | * Bob Smith, process specialist: rhsmith@adt-co.com | ||
===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
* [https://repository.upenn.edu/scn_sop/17/ QNF SOP] | * [https://repository.upenn.edu/scn_sop/17/ QNF SOP] | ||
| − | * [https://urldefense.com/v3/__https://lnf-wiki.eecs.umich.edu/wiki/ADT_7100_Dicing_Saw__;!!IBzWLUs!CxAen2043kyzzuVvC2TIklv-FS-rzC3b7KXgT_PfrFmrvE1Yxcqru6MgJTXBi5GMrvk$ | + | * [https://upenn.box.com/s/dixnkv9cdqksmqy67eg3rdk7tzw1d1go Operational Manual] |
| − | * [https://alliance.seas.upenn.edu/~qnf/wiki/index.php?title=File:DicingSelection.png | + | * [https://urldefense.com/v3/__https://lnf-wiki.eecs.umich.edu/wiki/ADT_7100_Dicing_Saw__;!!IBzWLUs!CxAen2043kyzzuVvC2TIklv-FS-rzC3b7KXgT_PfrFmrvE1Yxcqru6MgJTXBi5GMrvk$ Lurie SOP] |
| − | * [https://upenn.box.com/s/72vdy8fglkagye8pc1at2fdlg9bvpfqc | + | * [https://drive.google.com/file/d/1OaMUS65IQB3LxHb5uDhZkGpUV1rOP8GU/view?usp=sharing Wafer Mounting Video (Lurie Lab, University of Michigan)] |
| − | * [https://upenn.box.com/s/azdfq2hkroqw0br0razra1kktig7qx4w | + | * [https://alliance.seas.upenn.edu/~qnf/wiki/index.php?title=File:DicingSelection.png Dicing Blade Selection - No blade part numbers] |
| − | * [https://upenn.box.com/s/z7bg2lto5jf1pgb58cc1eh5t260p6uhg | + | * [https://upenn.box.com/s/72vdy8fglkagye8pc1at2fdlg9bvpfqc Material Dicing Guide] |
| − | * [https://upenn.box.com/s/0ze3lfcdozajmu9nlyo1qdsitmcn8cbc | + | * [https://upenn.box.com/s/azdfq2hkroqw0br0razra1kktig7qx4w Dicing Troubleshooting Guide] |
| − | * [https://upenn.box.com/s/tfoculmc6kzo1bnoldtjwcgyryl4vr6c | + | * [https://upenn.box.com/s/z7bg2lto5jf1pgb58cc1eh5t260p6uhg Applications Dicing Guide] |
| − | * [https://upenn.box.com/s/r66re7no7zadltzveigyokcq603ovp0x | + | * [https://upenn.box.com/s/0ze3lfcdozajmu9nlyo1qdsitmcn8cbc Detailed Material Dicing Guide] |
| + | * [https://upenn.box.com/s/tfoculmc6kzo1bnoldtjwcgyryl4vr6c Maintenance Manual] | ||
| + | * [https://upenn.box.com/s/r66re7no7zadltzveigyokcq603ovp0x ADT Resin Blades] | ||
Latest revision as of 16:00, 12 March 2024
 |
|
| Tool Name | ADT 7100 Dicing Saw |
|---|---|
| Instrument Type | Back End |
| Staff Manager | Eric Johnston |
| Lab Location | Singh 124 |
| Tool Manufacturer | Advanced Dicing Technologies (ADT) |
| Tool Model | 7122 |
| NEMO Designation | BE-04 |
| Lab Phone | none |
| SOP Link | SOP |
Description
Workhorse dicing saw with precision dicing and alignment system. This is an automated tool with a 2″, DC-brushless, 1.2 kW, Front-mounted, Air-bearing Spindle (60 krpm Max.), with closed-loop turntable, and is optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm.
Applications
- Dicing of Si wafers
- Dicing of glass wafers
- Dicing of sapphire wafers
Important Considerations
- Main cause of broken blades is having the saw descend directly onto the sample. The solution to this is to make sure your sample is centered as much as possible, and to have 10mm of over travel.
Resources
ADT Contacts:
- Bob McCort (semi-retired): rmccort@adt-co.com
- Bob Smith, process specialist: rhsmith@adt-co.com
