Soft Lithography

Process Flow

• Making a Master - Example Process Flow
• Making a Device - Example Process Flow

Process Videos

• Spin Coating Thick Resist
• Use of MA-03, ABM Mask Aligner
• Negative Resist First Mask Alignment Mark
• Developing SU8 Resist
• Degassing PDMS

Related Process Information

• Resists at QNF
• How to Make a Mask

Internal Resources

• T-Topping Study Report
• HARE SQ Adhesion Study - coming soon
• QNF Soft Lithography Workshop Process Flow - SU8 3050
• Presentation for Workshop - Biological Researchers (PDF Format)
• Presentation for ESE 536 Course Module (PDF Format)

External Resources

• HARE SQ Dispensing and Handling Techniques - KemLab
• PDMS Bonding - PIE Scientific
• Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou