Soft Lithography

THIS PAGE IS UNDER CONSTRUCTION

• Process Flow
• Course Material for the QNF Soft Lithography Workshop
• PDF Presentation for Biological Researchers
• PDF Presentation for ESE 536
• Training Videos

• Training Video - Spin Coating Thick Resist
• Training Video - Use of MA-03, ABM Mask Aligner
• Training Video - Negative Resist First Mask Alignment Mark
• Training Video - Developing SU8 Resist
• Training Video - Degassing PDMS

• How to Make a Mask
• Resists at QNF

Internal Reports

• T-Topping Study Report
• HARE SQ Adhesion Study - coming soon

External Resources

• HARE SQ Dispensing and Handling Techniques - KemLab
• PDMS Bonding - PIE Scientific
• Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou