Soft Lithography

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• Process Flow
• Course Material for the QNF Soft Lithography Workshop
• PDF Presentation for Biological Researchers
• PDF Presentation for ESE 536
• Training Videos

• Training Video - Spin Coating Thick Resist
• Training Video - Use of MA-03, ABM Mask Aligner
• Training Video - Negative Resist First Mask Alignment Mark
• Training Video - Developing SU8 Resist
• Training Video - Degassing PDMS

• How to Make a Mask
• Resists at QNF

External Resources

• Microfluidics and Nanofluidics Handbook: SU-8 Photolithography and Its Impact on Microfluidics by Rodrigo Martinez-Duarte and Marc J. Madou