Ancillary Process Chemicals at QNF
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The following are available within the QNF.
| Name | Manufacturer | Chemical Composition | Hazards | Use | Alternatives |
|---|---|---|---|---|---|
| HMDS (Vapor Prime) | N/A | HMDS | Toxic, Irritant, Flammable | Resist Adhesion | Surpass 3000, Surpass 4000, KL Spin-on Primer 80/20 |
| Surpass 3000 | DisChem | Proprietary, aqueous acidic | Resist Adhesion | Surpass 4000, HMDS Vapor Prime, KL Spin-on Primer 80/20 | |
| Surpass 4000 | DisChem | Proprietary, aqueous alkaline | Resist Adhesion | Surpass 3000, HMDS Vapor Prime, KL Spin-on Primer 80/20 | |
| KL Spin-on Primer 80/20 | KemLab | 20% HMDS, 80% Acetate | Toxic, Irritant, Flammable | Resist Adhesion | HMDS Vapor Prime, Surpass 3000, Surpass 4000 |
| Discharge H2O | DisChem | Proprietary | Anti-charging for EBL | Metal Deposition (Au) | |
| Omnicoat | MicroChem/Kayaku | Proprietary | SU8 Removal |