Lesker PVD75 E-beam Evaporator
Revision as of 13:23, 29 April 2022 by Dsbarth (talk | contribs) (Protected "Lesker PVD75 E-beam Evaporator" ([Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite)) [cascading])
 |
|
| Tool Name | Lesker PVD75 E-Beam/Thermal Evaporator |
|---|---|
| Instrument Type | Deposition |
| Staff Manager | David Jones |
| Lab Location | Bay 2 |
| Tool Manufacturer | Kurt J. Lesker |
| Tool Model | PVD75 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 8-9748 |
| SOP Link | SOP |
Description
The Kurt J. Lesker PVD75 E-beam Evaporator is an electron-beam (e-beam) evaporation tool. The tool is a fully automated system for depositing Ti, Cr, Au, and/or Pd via e-beam evaporation.
Films
- Ti
- Cr
- Au
- Pd