Intlvac E-beam Evaporator
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| Tool Name | Lesker PVD75 E-Beam/Thermal Evaporator |
|---|---|
| Instrument Type | Physical vapor deposition |
| Staff Manager | David Barth |
| Lab Location | Bay 2 |
| Tool Manufacturer | Kurt J. Lesker |
| Tool Model | PVD75 |
| NEMO Designation | PVD-04 |
| Lab Phone | 215-898-9748 |
| SOP Link | SOP |
Description
The tool
Available materials
The tool contains the following materials:
- Al- Aluminum
- Ti - Titanium
Resources
SOPs & Troubleshooting
Link: SOP