The QNF provides a variety of standard resists to meet demands for most applications. Some specialty resists are also sold through the QNF Stockroom. A summary of stocked resists along with some processing information can be found in the table below. Other similar options that may be available in QNF are also listed.
QNF Supplied Standard Photoresists
Click on the resist name to access the datasheet.
| Name (+ Datasheet) |
Tone |
Use |
Composition |
Developer |
Remover |
Alternative Resists
|
| S1805 |
+ |
General |
PGMEA |
MF-319 (0.24N TMAH) |
MP 1165 (NMP) |
KL5305
|
| S1813 |
+ |
General |
PGMEA |
MF-319 (0.24N TMAH) |
MP 1165 (NMP) |
KL5315
|
| S1818 |
+ |
General |
PGMEA |
MF-319 (0.24N TMAH) |
MP 1165 (NMP) |
|
| SPR 220-3 |
+ |
Etch |
Ethyl lactate, anisole, n-amyl acetate |
0.24N TMAH |
MP 1165 (NMP) |
KPRO-3, KL6003, AZ3330F
|
| SPR 220-4.5 |
+ |
Etch |
Ethyl lactate, anisole, n-amyl acetate |
0.24N TMAH |
MP 1165 (NMP) |
KPRO-3, KL6003, AZ3330F
|
| SPR 220-7 |
+ |
Etch |
Ethyl lactate, anisole, n-amyl acetate |
0.24N TMAH or 0.26N TMAH |
MP 1165 (NMP) |
AZ 12XT, AZ P4620
|
| AZ 3330F |
+ |
General, Metal RIE, Plating |
PGMEA |
AZ300 (0.26N TMAH) or AZ400K 1:4 (metal ion/ alkaline salts) |
SPR 220-3, SPR 220-4.5, K-PRO 3, KL6003
|
| NR7-3000P |
- |
Etch, General |
Cyclohexanone |
RD6 (0.24N or 0.26N TMAH) |
RR4 (DMSO), Acetone |
|
| APOL-LO 3202 |
- |
Liftoff |
PGMEA |
0.26N TMAH |
NMP, DMSO |
|
| IP-Dip |
- |
Nanoscribe, Epoxy |
Ethoxylated acrylates |
PGMEA, IPA |
|
|
| HARE SQ 2 |
- |
Epoxy |
Cyclopentanone, gamma butyro lactone |
PGMEA |
|
SU-8 2005
|
| HARE SQ 50 |
- |
Epoxy |
Cyclopentanone, gamma butyro lactone |
PGMEA |
|
SU-8 2050
|
Stockroom Photoresists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| SU-8 2005 |
- |
Epoxy |
HARE SQ 2 |
Datasheet
|
| SU-8 2050 |
- |
Epoxy |
HARE SQ 50 |
Datasheet
|
| SU-8 2100 |
- |
Epoxy |
HARE SQ 50 |
Datasheet
|
| SU-8 3050 |
- |
Epoxy |
HARE SQ 50 |
Datasheet
|
Standard e-beam Resists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| 495 PMMA A8 |
+ |
Lower Resolution |
|
Datasheet
|
| 495 PMMA A4 |
+ |
Lower Resolution |
|
Datasheet
|
| 495 PMMA A2 |
+ |
Lower Resolution |
|
Datasheet
|
| 950 PMMA A4 |
+ |
High Resolution |
|
Datasheet
|
| 950 PMMA A2 |
+ |
High Resolution |
1000 HARP 0.1 |
Datasheet
|
| 1000 HARP 1.3 |
+ |
High Resolution |
|
Datasheet
|
| 1000 HARP 0.1 |
+ |
High Resolution |
950 PMMA A2 |
Datasheet
|
Stockroom e-beam Resists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| ZEP 520A |
+ |
Thicker formulation |
|
Datasheet
|
| ZEP 520A-7 |
+ |
Thinner formulation |
|
Datasheet
|
| H-SiQ 6% |
- |
HSQ Equivalent |
|
Datasheet
|
Other Resists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| LOR 3A |
N/A |
Liftoff, Non-imaging |
|
Datasheet
|
| PMGI SF 5S |
N/A |
Liftoff, Non-imaging |
|
Datasheet
|
| PMGI SF 2S |
N/A |
Liftoff, Non-imaging |
|
Datasheet
|
| NXR-1025 |
N/A |
Stockroom, Nanoimprint resist |
|
Datasheet
|
Miscellaneous
These may be available but are not guaranteed to be stocked
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| KL5305 |
+ |
General |
S1805 |
Datasheet
|
| KL5315 |
+ |
General |
S1813 |
Datasheet
|
| KL6003 |
+ |
|
SPR 220-3, SPR 220-4.5 |
Datasheet
|
| K-PRO 3 |
+ |
Plating, Etching |
SPR 220-3, SPR 220-4.5 |
Datasheet
|
| AZ 12XT-20PL-15 |
+ |
CAR (i-line), Plating, Packaging, Deep Etch |
SPR 220-7, AZ P4620 |
Datasheet
|
| AZ P4620 |
+ |
Thick Resist, Plating, Packaging |
SPR 220-7, AZ 12XT-20PL-15 |
Datasheet
|
| ma-N 2403 |
- |
e-beam/DUV Mix and Match |
|
Datasheet
|