Filmetrics Profilm3D
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| Tool Name | Filmetrics Profilm3D Optical Profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | David Barth |
| Lab Location | Cleanroom Corridor |
| Tool Manufacturer | Filmetrics |
| Tool Model | Profilm3D |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The Profilm3D is an optical profilometer capable of white light interferometry (WLI), green light interferometry (GLI), and phase shift interferometry (PSI). It can measure surface topography, roughness, and step heights from 1 nm up to 10 mm. The tool currently has a 10x interferometry objective with a field of view ~2x2mm.
Applications
- Step height measurements
- Surface roughness measurements
- 3D mapping of surfaces